1

Introduction — processes and variation framework

Process control overview (PDF)

Boning, Duane S., et al. "A General Semiconductor Process Modeling Framework." IEEE Transactions on Semiconductor Manufacturing 5 (November 1992): 266-280.

5

Probability models, parameter estimation, and sampling

Kurtosis handout (PDF)

10

Yield modeling

Ciplickas, Dennis J., et al. "Predictive Yield Modeling of VLSIC's." IEEE 5th International Workshop on Statistical Metrology (June 2000): 28-37.

Stapper, Charles H., and Raymond J. Rosner. "Integrated Circuit Yield Management and Yield Analysis: Development and Implementation." IEEE Transactions on Semiconductor Manufacturing 8 (May 1995): 95-102.

17

Nested variance components

 Drain, Davis. "Variance Components and Process Sampling Design." Chapter 3 in Statistical Methods for Industrial Process Control. New York, NY: Chapman & Hall, 1996. ISBN: 9780412085116.

Example, nested variance components (XLS)

19

Case study 1: tungsten CVD DOE/RSM

Example, tungsten RSM (XLS)

Example, tungsten RSM (JMP)

20

Case study 2: cycle to cycle control

Hardt, D. E., and Tsz-Sin Siu. "Cycle to Cycle Manufacturing Process Control." SMA, 2002.

Rzepniewski, Adam K., et al. "Cycle-to-Cycle Control of Multivariable Manufacturing Processes with Process Model Uncertainty." ASME International Mechanical Engineering Congress and Exposition (2004): IMECE2004-61783.

21

Case study 3: spatial modeling

Guo, Ruey-Shan, and Emanuel Sachs. "Modeling, Optimization, and Control of Spatial Uniformity in Manufacturing Processes." IEEE Transactions on Semiconductor Manufacturing6 (February 1993): 41-57.

Davis, Joseph C., et al. "A Robust Metric for Measuring Within-Wafer Uniformity." IEEE Transactions on Components, Packaging, and Manufacturing Technology C 19 (October 1996): 283-289.

Mozumder, Purnendu K., and Lee M. Loewenstein. "Method for Semiconductor Process Optimization Using Functional Representations of Spatial Variations and Selectivity." IEEE Transactions on Components, Hybrids, and Manufacturing Technology 15 (June 1992): 311-316.

1

(PDF)

(PDF) (Courtesy of Eehern Wong.)

2

(PDF)

Problem 4:(XLS)

Control lab video

(PDF)

3

(PDF)

Problem 4: (XLS)

Problem 5: (XLS)

(PDF)

4

(PDF)

Problem 2: (XLS)

(PDF)

5

(PDF)

(PDF)

6

(PDF)

Problem 1: (XLS)

(PDF) (Courtesy of Xiangyong Su, Koji Umeda, and Kaizhao Lee.)

7

(PDF)

Problem 3: (XLS)

(PDF) (Courtesy of Xiangyong Su and Richard Schwenke.)

8

(PDF)

Problem 1: (XLS)

(PDF) (Courtesy of Mohammed Imani Nejad and Xiao Shen.)

2005

Problems (PDF)

2006

Problems (PDF)

Solutions (PDF)

Problems (PDF)

Solutions (PDF)

2007

Problems (PDF)

Solutions (PDF)

Problems (PDF)

2008

Problems (PDF)

Solutions (PDF)

Problems (PDF)

Solutions (PDF)